The development direction of high speed, large capacity and wide bandwidth of optical communication requires the high integration of photoelectric devices. The premise of integration is the miniaturization of photoelectric devices. Therefore, the miniaturization of photoelectric devices is the forefront and hot spot in the field of optical communication. In recent years, compared with traditional optoelectronic technology, femtosecond laser micromachining technology will become a new generation of optoelectronic device manufacturing technology. Scholars at home and abroad have made beneficial exploration in many aspects of optical waveguide preparation technology and made great progress.